Studi Pengaruh Variasi Laju Aliran Gas Argon Pada Sistem Plasma Sputtering (Physical Vapor Deposition) Terhadap Pembentukan Lapisan Tipis Karbon Di Atas Substrat Kaca
| Main Author: | Alim, Syahirul |
|---|---|
| Format: | Thesis NonPeerReviewed |
| Terbitan: |
, 2017
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| Subjects: | |
| Online Access: |
http://repository.ub.ac.id/155235/ |
| Description not available. |