Data for: Bipolar HiPIMS for tailoring ion energies in thin film deposition
| Main Author: | Helmersson, Ulf |
|---|---|
| Format: | Dataset |
| Terbitan: |
Mendeley
, 2018
|
| Subjects: | |
| Online Access: |
https:/data.mendeley.com/datasets/xc89y4br4j |