Tailored Molybdenum Carbide Properties and Graphitic Nano Layer Formation by Plasma and Ion Energy Control during Plasma Enhanced ALD
| Main Authors: | Grady, Eldad, Verheijen,, Verheijn, Faraz, Tahsin, Karwal, Saurabh, Kessels, W.M.M., Bol, Ageeth A. |
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| Format: | info publication-preprint Journal |
| Terbitan: |
, 2019
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/3539554 |
Internet
https://zenodo.org/record/3539554Lokasi
| Koleksi | Cognizance Journal of Multidisciplinary Studies |
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| Gedung | Cognizance Journal of Multidisciplinary Studies |
| Institusi | ZAIN Publications |
| Kota | Stockholm |
| Provinsi | INTERNASIONAL |
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