PENGARUH MEDAN DEPOSISI PADA STRUKTUR MIKRO, RESISTANSI DAN NISBAH MR LAPISAN TIPIS NiemYANG DISIAPKAN DENGAN DC MAGNETRON SPUTTERING
| Main Author: | Toifur, Moh. |
|---|---|
| Format: | Article info application/pdf eJournal |
| Bahasa: | ind |
| Terbitan: |
Center for Science & Technology of Advanced Materials - National Nuclear Energy Agency
, 2019
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| Subjects: | |
| Online Access: |
http://jurnal.batan.go.id/index.php/jsmi/article/view/5200 http://jurnal.batan.go.id/index.php/jsmi/article/view/5200/4515 |
| Description not available. |