Effect of Chlorine Plasma Treatment on Electronic Properties of GIZO Thin Film Grown on SiO2/Si Substrate
| Main Authors: | Tahir, Dahlang; Department of Physics, Hasanuddin University, Oh, Suhk Kun; Department of Physics, Chungbuk National University, Kang, Hee Jae; Department of Physics, Chungbuk National University, Heo, Sung; Analytical Engineering Center, Samsung Advanced Institute of Technology, Chung, Jae Gwan; Analytical Engineering Center, Samsung Advanced Institute of Technology, Lee, Jae Cheol; Analytical Engineering Center, Samsung Advanced Institute of Technology |
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| Format: | Article info application/pdf eJournal |
| Bahasa: | eng |
| Terbitan: |
ITB Journal Publisher, LPPM ITB
, 2013
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| Subjects: | |
| Online Access: |
http://journals.itb.ac.id/index.php/jmfs/article/view/804 http://journals.itb.ac.id/index.php/jmfs/article/view/804/485 |
Daftar Isi:
- The effect of chlorine plasma treatment on electronic properties of GIZO grown on SiO2/Si by RF magnetron sputtering was investigated using X-ray photoelectron spectroscopy (XPS), reflection electron energy loss spectroscopy (REELS), and secondary ion mass spectroscopy (SIMS). SIMS depth profiles indicated that the concentration of InO and ZnO on the surface was decreased after Cl2 plasma treatment. REELS data showed that the band gap increased from 3.4 to 3.7 eV. XPS showed that Ind5/2 and Zn2p3/2 shifted to the higher binding energies by 0.5 eV and 0.3 eV, respectively. These phenomena were caused by oxygen deficiency and hydrocarbon contamination reduction as indicated by Cl atom bonding with In and Zn cations that are present on the surface after Cl2 plasma treatment.