Effect of Chlorine Plasma Treatment on Electronic Properties of GIZO Thin Film Grown on SiO2/Si Substrate

oleh Tahir, Dahlang; Department of Physics, Hasanuddin University, Oh, Suhk Kun; Department of Physics, Chungbuk National University, Kang, Hee Jae; Department of Physics, Chungbuk National University, Heo, Sung; Analytical Engineering Center, Samsung Advanced Institute of Technology, Chung, Jae Gwan; Analytical Engineering Center, Samsung Advanced Institute of Technology, Lee, Jae Cheol; Analytical Engineering Center, Samsung Advanced Institute of Technology
Terbitan: ITB Journal Publisher, LPPM ITB, 2013