Spektroskopi inframerah dan sifat optis amorf silikon karbon (a-SiC:H) hasil deposisi metode DC magnetron sputtering
| Main Authors: | Lusitra Munisa, author, Add author: Rosari Saleh, supervisor, Add author: Dedi Suyanto, examiner, Add author: Na, Peng Bo, examiner, Add author: Silva, B.E.F. da, examiner, Add author: A.G. Harsono, examiner |
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| Format: | Masters Bachelors |
| Terbitan: |
Universitas Indonesia
, 1999
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| Subjects: | |
| Online Access: |
http://lontar.ui.ac.id/detail?id=75893 |