Data for: Potassium Tartrate as a Complexing Agent for Chemical Mechanical Polishing of Cu/Co/TaN Barrier Liner Stack in H2O2 Based Alkaline Slurries
| Main Author: | pan, guofeng |
|---|---|
| Other Authors: | Liu, Jia, Hu, Lianjun, Wang, Chenwei, Li, Can, He, Ping, Zhang, Xinbo |
| Format: | Dataset |
| Terbitan: |
Mendeley
, 2019
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| Subjects: | |
| Online Access: |
https:/data.mendeley.com/datasets/v2wvzhs6bt |
Daftar Isi:
- All the data in this paper was included in this research file.