Subroutines for some plasma surface interaction processes: physical sputtering, chemical erosion, radiation enhanced sublimation, backscattering and thermal evaporation
| Main Author: | CPC, Mendeley |
|---|---|
| Other Authors: | Warrier, Manoj, Schneider, Ralf, Bonnin, Xavier |
| Format: | Dataset |
| Terbitan: |
Mendeley
, 2004
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| Subjects: | |
| Online Access: |
https:/data.mendeley.com/datasets/329fxb9zn7 |
| Description not available. |