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Deposition of Carbon Thin Film by Means of a LowFrequency Plasma Sputtering Using Battery Carbon Rods as a Target

Main Authors: Purkuncoro, Aladin Eko, Santjojo, Dionysius J. D. H., Irawan, Yudy S., Soenoko, Rudy
Format: Article PeerReviewed Book
Bahasa: eng
Terbitan: IOP Publishing , 2019
Subjects:
Mechanical Engineering
Online Access: http://eprints.itn.ac.id/5197/1/9.%20Purkuncoro_2019_IOP_Conf._Ser.__Mater._Sci._Eng._515_012041%20%281%29.pdf
http://eprints.itn.ac.id/5197/2/9.%20PEER%20REVIEW%20JURNAL%209%20PROSEDING%20DEPOSITION%20OF%20CARBON.pdf
http://eprints.itn.ac.id/5197/3/Deposition%20of%20Carbon%20Thin%20Film%20by%20Means%20of%20a%20LowFrequency%20Plasma%20Sputtering%20Using%20Battery%20Carbon%20Rods%20as%20a%20Target.pdf
http://eprints.itn.ac.id/5197/

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