Low pressure CVD of polycrystalline silicon reaction kinetics and reactor modelling
| Main Author: | WEERTS, Wihelmina Louisa Maria |
|---|---|
| Format: | Book |
| Terbitan: |
Technische Universiteit Eindhoven
, 1995
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| Subjects: | |
| Online Access: |
https://webpac.lib.itb.ac.id/search/detail/72771 |
Internet
https://webpac.lib.itb.ac.id/search/detail/72771Lokasi
| Koleksi | Katalog UPT Perpustakaan ITB |
|---|---|
| Gedung | Perpustakaan Institut Teknologi Bandung |
| Institusi | Institut Teknologi Bandung |
| Kota | KOTA BANDUNG |
| Provinsi | JAWA BARAT |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |