Low pressure CVD of polycrystalline silicon reaction kinetics and reactor modelling
| Main Author: | WEERTS, Wihelmina Louisa Maria |
|---|---|
| Format: | Book |
| Terbitan: |
Technische Universiteit Eindhoven
, 1995
|
| Subjects: | |
| Online Access: |
https://webpac.lib.itb.ac.id/search/detail/72771 |
Daftar Isi:
- 288 hlm.: gamb., tab.; 24 cm