FUNDAMENTALS Aspect of REaction in Titanium-Silicon Thin Films for Integrated Circuits
| Main Author: | RAAIJMAKERS, Ivo J.M.M |
|---|---|
| Format: | Book |
| Subjects: | |
| Online Access: |
https://webpac.lib.itb.ac.id/search/detail/63891 |
Daftar Isi:
- x, 141 hlm.: Ganb., Tab.; 22 cm.