Pengaruh Laju Alir Gas Argon Pada Plasma Sputtering Karbon Di Atas Quartz Crystal Microbalance (Qcm) Terhadap Karakter Plasma
| Main Author: | Alim, Risha Famelia Auliasari |
|---|---|
| Format: | Thesis NonPeerReviewed |
| Terbitan: |
, 2020
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| Subjects: | |
| Online Access: |
http://repository.ub.ac.id/183162/ |