Desain Sistem Plasma Sputtering serta Pengaruh Tekanan dan Laju Alir terhadap Karakter Plasma pada Proses Deposisi Karbon
| Main Author: | Pambudi, Dwi Ratna Setya |
|---|---|
| Format: | Thesis NonPeerReviewed Book |
| Bahasa: | eng |
| Terbitan: |
, 2019
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| Subjects: | |
| Online Access: |
http://repository.ub.ac.id/177618/1/Dwi%20Ratna%20Setya%20Pambudi%20%282%29.pdf http://repository.ub.ac.id/177618/ |