X-ray Photoelectron Spectroscopy (XPS) Analysis of Undoped ZnO and ZnO:Er Thin Films
| Main Authors: | Sugihartono, Iwan; Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220, Budi, Esmar; Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220, Budi, Agus Setyo; Jurusan Fisika, FMIPA Universitas Negeri Jakarta, Jl Pemuda No. 10 Rawamangun, 13220 |
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| Format: | Article info application/pdf eJournal |
| Bahasa: | eng |
| Terbitan: |
Fakultas MIPA Universitas Jember
, 2015
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| Online Access: |
http://jurnal.unej.ac.id/index.php/JID/article/view/1052 http://jurnal.unej.ac.id/index.php/JID/article/view/1052/1528 |
Daftar Isi:
- Undoped ZnO and ZnO:Er thin films were deposited on p-type Si substrates by ultrasonic spray pyrolisis (USP). Undoped and ZnO:Er thin films have been analyzed by using X-ray Photoelectron Spectroscopy (XPS). The results show that the XPS spectrum has two Er peak at ∼157 eV and ∼168 eV. The XPS Zn 2p spectrum of undoped ZnO and ZnO:Er thin films have binding energy for Zn 2p3/2 (~ 1021 eV) and Zn 2p1/2 (~1045eV) were found no shift in binding energy after the incorporation of Er. Meanwhile, after Er incorporates into ZnO, the O 1s spectrum is composed two peak of binding energy (BE) at ~530.5eV and the shoulder about 532.5 eV.Keywords: ZnO thin films, ZnO:Er, XPS, binding energy