PREPARATION AND PHOTOLUMINESCENCE PROPERTIES OF RF-SPUTTERED ZnO FILMS

Main Authors: Lieu, N. T. T., Canh, T. D., Nghia, N. X., Tarigan, K., Phan, T. L.
Format: Article info application/pdf Journal
Bahasa: eng
Terbitan: Mercu Buana University , 2015
Online Access: http://umb-intl-journal.com/index.php/ijimeam/article/view/8
http://umb-intl-journal.com/index.php/ijimeam/article/view/8/30
Daftar Isi:
  • ZnO/Si films were prepared by radio frequency (RF) magnetron sputtering at room temperature. By optimizing the heat treatment conditions, we obtained a good quality film annealed at 700 oC for longer 60 minutes. This process was monitored carefully by Raman scattering spectroscopy, and X-ray diffraction. The photoluminescence study on this film revealed that only ultraviolet emissions due to donor-acceptor pair (DAP), neutral acceptor-bound exciton (AoX) and donor-bound exciton (DoX) were observed. The intensity and peak position of these emissions depend on the measurement temperature and excitation power density.