Plasma processes for semiconductor fabrication
| Main Author: | Hitchon,W.N.G. |
|---|---|
| Format: | Book |
| Terbitan: |
Cambridge University Press
, 1999
|
| Subjects: | |
| Online Access: |
http://opac.unila.ac.id//index.php?p=show_detail&id=90219 |
Daftar Isi:
- Indeks.hlm.:213 -221
- ix, 221 hlm. : il. ; 24 cm.