Plasma processes for semiconductor fabrication
| Main Author: | W.N.G. Hitchon |
|---|---|
| Format: | Book |
| Terbitan: |
Cambridge University Press
, 1999
|
| Subjects: | |
| Online Access: |
http://opac.unila.ac.id//index.php?p=show_detail&id=22034 |
Daftar Isi:
- Indeks *** *** Bibliografi hlm. 205-211
- ix, 221 hlm. :il. ;24 cm.