ON-CHIP VACUUM GENERATED BY A MICROMACHINED KNUDSEN PUMP
| Main Authors: | McNamara, Shamus, B Gianchandani, Yogesh |
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| Format: | Article PeerReviewed |
| Terbitan: |
Binus University
, 2005
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| Subjects: | |
| Online Access: |
http://eprints.binus.ac.id/26701/ http://library.binus.ac.id/Collections/journal_detail.aspx?subject=9&volnoed=Volume 14 / Nomor 04 / August 2005&title=ON-CHIP VACUUM GENERATED BY A MICROMACHINED KNUDSEN PUMP |
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