THE EFFECT OF TARGET NITRIDATION ON STRUCTURAL PROPERTIES OF InN GROWN BY RADIO-FREQUENCY REACTIVE SPUTTERING
Main Authors: | Motlan, , Goldys, E.M., Tansley, T.L. |
---|---|
Format: | Article PeerReviewed |
Terbitan: |
ScienceDirect
, 2002
|
Subjects: | |
Online Access: |
http://digilib.unimed.ac.id/35826/ https://doi.org/10.1016/S0040-6090(02)00772-1 |
Internet
http://digilib.unimed.ac.id/35826/https://doi.org/10.1016/S0040-6090(02)00772-1
Lokasi
Koleksi | Digital Repository Universitas Negeri Medan |
---|---|
Gedung | Perpustakaan Universitas Negeri Medan |
Institusi | Universitas Negeri Medan |
Kota | KOTA MEDAN |
Provinsi | SUMATERA UTARA |
Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |