THE EFFECT OF TARGET NITRIDATION ON STRUCTURAL PROPERTIES OF InN GROWN BY RADIO-FREQUENCY REACTIVE SPUTTERING

Main Authors: Motlan, , Goldys, E.M., Tansley, T.L.
Format: Article PeerReviewed
Terbitan: ScienceDirect , 2002
Subjects:
Online Access: http://digilib.unimed.ac.id/35826/
https://doi.org/10.1016/S0040-6090(02)00772-1

Internet

http://digilib.unimed.ac.id/35826/
https://doi.org/10.1016/S0040-6090(02)00772-1

Lokasi

Koleksi Digital Repository Universitas Negeri Medan
Gedung Perpustakaan Universitas Negeri Medan
Institusi Universitas Negeri Medan
Kota KOTA MEDAN
Provinsi SUMATERA UTARA
Kontak Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini.