Fabrication process of CO gas sensor devices based tin oxide (SnO2) by Thick Film Technology
| Main Author: | Widodo, Slamet |
|---|---|
| Format: | Proceeding application/pdf |
| Terbitan: |
Satya Wacana University Press
, 2016
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| Subjects: | |
| Online Access: |
http://repository.uksw.edu/handle/123456789/7136 |
Daftar Isi:
- Proceedings of the International Conference on Science and Science Education August 2015, p. SC.149-162 Available on http://fsm.uksw.edu/ojs/index.php/2015/article/view/71
- In this paper is described the design and fabrication of tin oxide (SnO2) based gas sensors by thick-film technology. Sensors are designed consisting of constituent components as such as: heater, electrodes (inter digital fingers),and the sensitive layer of the Tin Oxide (SnO2) material. These sensors are made multi layers, heater and two components have been designed in a single electrode surface by considering the aspects of miniaturization, heat distribution, and power consumption of sensor devices. While the process of heater and the electrode on a substrate made of alumina (Al2O3) with silver paste (Ag). In this study there are differences in the thickness of the sensitive layer affects the atomic bonding materials that affect the change in resistance . The results indicate a sensitive coating material change in value of the linear resistance to temperature changes is given. Results expected maximum is the lowest resistance for sensors that work can be accomplished at a temperature that is not too high, so the sensors will work faster and more sensitive . The test results given gas flow sensor with CO showed good results that CO gas sensors can work at temperatures of 165 °C -sensitive layer which is used to detect CO gas sensor is SnO2with a sensitivity of 4 %.