PROSEDUR PENGUKURAN KEKERASAN YANG BENAR PADA NANOKOMPOSIT nc-TiN/a-Si3N4

Main Author: Keba Moto
Format: Article application/pdf eJournal
Bahasa: eng
Terbitan: Directorate of Research and Community Engagement, Universitas Indonesia , 2010
Online Access: http://journal.ui.ac.id/index.php/technology/article/view/96
Daftar Isi:
  • Hardness of nc-TiN/a-Si3N4 nanocomposites which was determined by using two methods of measurements i. e. depth sensing method and remaining plastic indentation area that were magnified by using SEM (Scanning Electron Microscope) lie in the good agreement. The hardness value is not influenced by the biaxial and residual compressive stress. The measurement of the biaxial stress on the substrate shows a very small value of biaxial stress as well as the constant hardness and crystallite size against annealing temperature. Therefore, the reported hardness value here is theintrinsic value that depend on its microstructure properties.Keywords: Nanokomposit, hardness, nanokomposit