Distribusi keterbalan dan distribusi resistivitas listrik lapisan tipis Indium tin oxide (ITO) yang dibuat dengan metode sputtering

Main Authors: Antonius Suban Hali, author, Add author: Na, Peng Bo, supervisor
Format: Masters Thesis
Terbitan: Universitas Indonesia , 2008
Subjects:
Online Access: https://lib.ui.ac.id/detail?id=20236070
ctrlnum 20236070
fullrecord <?xml version="1.0"?> <dc schemaLocation="http://www.openarchives.org/OAI/2.0/oai_dc/ http://www.openarchives.org/OAI/2.0/oai_dc.xsd"><type>Thesis:Masters</type><title>Distribusi keterbalan dan distribusi resistivitas listrik lapisan tipis Indium tin oxide (ITO) yang dibuat dengan metode sputtering</title><creator>Antonius Suban Hali, author</creator><creator>Add author: Na, Peng Bo, supervisor</creator><publisher>Universitas Indonesia</publisher><date>2008</date><subject>Sputtering (Physics) -- Measurement -- Data processing</subject><identifier>https://lib.ui.ac.id/detail?id=20236070</identifier><recordID>20236070</recordID></dc>
format Thesis:Masters
Thesis
Thesis:Thesis
author Antonius Suban Hali, author
Add author: Na, Peng Bo, supervisor
title Distribusi keterbalan dan distribusi resistivitas listrik lapisan tipis Indium tin oxide (ITO) yang dibuat dengan metode sputtering
publisher Universitas Indonesia
publishDate 2008
topic Sputtering (Physics) -- Measurement -- Data processing
url https://lib.ui.ac.id/detail?id=20236070
id IOS18066.20236070
institution Universitas Indonesia
institution_id 51
institution_type library:university
library
library Perpustakaan Universitas Indonesia
library_id 492
collection contoh Repository Tesis (Open) Universitas Indonesia
repository_id 18066
city KOTA DEPOK
province JAWA BARAT
repoId IOS18066
first_indexed 2022-12-14T02:33:22Z
last_indexed 2022-12-14T02:33:22Z
recordtype dc
merged_child_boolean 1
_version_ 1752196598116384768
score 17.538404