Process for thin film deposition through controlled formation of vapor phase transient species US Pat. 11,248,291
| Main Authors: | Arkles, Barry C., Kaloyeros, Alain E. |
|---|---|
| Format: | info publication-patent Journal |
| Bahasa: | eng |
| Terbitan: |
, 2022
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/6099704 |
Internet
https://zenodo.org/record/6099704Lokasi
| Koleksi | Cognizance Journal of Multidisciplinary Studies |
|---|---|
| Gedung | Cognizance Journal of Multidisciplinary Studies |
| Institusi | ZAIN Publications |
| Kota | Stockholm |
| Provinsi | INTERNASIONAL |
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