Eigenvector Metal Etch Data Parser
| Main Author: | Jaganadh Gopinadhan |
|---|---|
| Format: | info software Journal |
| Bahasa: | eng |
| Terbitan: |
, 2022
|
| Subjects: | |
| Online Access: |
https://zenodo.org/record/5919196 |
Daftar Isi:
- The Eigenvector Etch Data Parse is developed to read Matlab data files. The parse reads each file and converts the calibration data (sensor data) and test data (sensor data) into a single DataFrame. The parse introduced an additional field in the data 'fault_name', which helps the user identify the normal/calibration wafers and test wafers(with defects). We tested the parser in Python3 environments only; if you are looking for Python2 compatibility, please test and create a bug/pull request as applicable. The source code is released under Apache 2.0 license and is available at https://github.com/jaganadhg/egvsemicon.