Poster on 'Fabrication and Initial Electrical Characterization of Silicon Junctionless Nanowire Transistors (JNTs) for Gas Sensing' for Nanonet+ Workshop 2021
| Main Author: | Ghosh, Sayantan |
|---|---|
| Format: | Proceeding poster Journal |
| Bahasa: | eng |
| Terbitan: |
, 2021
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/5554209 |
Daftar Isi:
- Abstract : Silicon nanowire (Si NW) sensors are very promising because of their fast, low-cost, label-free, real-time detection of chemical and biological species. They have already demonstrated outstanding sensitivity and selectivity towards a large number of analytes in both liquid and gas phases. In particular, silicon junctionless nanowire transistors (JNTs) have recently detected record low concentrations (down to the zeptomolar range) of the protein streptavidin in liquid phase. However, JNTs have not yet been tested for sensing in gas phase. Here we present the fabrication and initial electrical characterisation of JNT-based sensors for detection of atmospheric free radicals such as hydroxyl (•OH) and nitrate (•NO3), which are the main drivers of chemical processes in the atmosphere. Silicon-on-insulator wafers have been used for device fabrication. The wafers have first been doped by a chain phosphorous implantation with nine different energies to form a box-like dopant profile across the 20 nm thick top Si layer. Subsequently, flash lamp annealing has been performed for defect healing and dopant activation. Device patterning has been based mainly on electron beam lithography, inductively-coupled reactive ion etching, metal deposition and lift-off processes. Initial electrical characterisation of fabricated devices by back-gating has proven their good performance and potential suitability for detection of atmospheric free radicals. Additional Information: Sayantan Ghosh delivered this presentation for Nanonet+ Workshop 2021. RADICAL represents a 'Fundamental Breakthrough in Detection of Atmospheric Free Radicals'. Find out more on the RADICAL project website: radical-air.eu The RADICAL project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement number 899282.