Why sputtering target cracks?
| Main Authors: | Sharma, Rishabh, Sharma, Shivam |
|---|---|
| Format: | info Lainnya Journal |
| Bahasa: | eng |
| Terbitan: |
, 2020
|
| Subjects: | |
| Online Access: |
https://zenodo.org/record/4319582 |
Daftar Isi:
- Crack formation commonly occurs in ceramic sputtering targets like oxides, carbides, nitride etc and in brittle material sputtering targets like chromium, antimony, bismuth etc. In this article we will briefly discuss, why sputtering targets cracks and what precautions can be taken to avoid this?