High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits
| Main Authors: | Liu, Junqiu, Huang, Guanhao, He, Jijun |
|---|---|
| Format: | info dataset Journal |
| Terbitan: |
, 2020
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| Online Access: |
https://zenodo.org/record/4273990 |
Daftar Isi:
- Available data for "High-yield, wafer-scale fabrication of ultralow-loss, dispersion-engineered silicon nitride photonic circuits"