Nonlinear laser lithography for indefinitely large-area nanostructuring with femtosecond pulses
| Main Author: | Öktem Bülent, Pavlov Ihor, Ilday Serim, Kalaycioǧlu Hamit, Rybak Andrey, Yavaş Seydi, Erdoǧan Mutlu, Ilday F. Ömer |
|---|---|
| Format: | Article Journal |
| Bahasa: | eng |
| Terbitan: |
, 2020
|
| Online Access: |
https://zenodo.org/record/4020495 |
Daftar Isi:
- Dynamical systems based on the interplay of nonlinear feed- back mechanisms are ubiquitous in nature1–5. Well-understood examples from photonics include mode locking6 and a broad class of fractal optics7, including self-similarity8. In addition to the fundamental interest in such systems, fascinating techni- cal functionalities that are difficult or even impossible to achieve with linear systems can emerge naturally from them7 if the right control tools can be applied. Here, we demonstrate a method that exploits positive nonlocal feedback to initiate, and negative local feedback to regulate, the growth of ultrafast laser-induced metal–oxide nanostructures with unprecedented uniformity, at high speed, lowcost and on non-planar or flexible surfaces. The nonlocal nature of the feedback allows us to stitch the nanostructures seamlessly, enabling coverage of indefi- nitely large areas with subnanometre uniformity in periodicity. We demonstrate our approach through the fabrication of tita- nium dioxide and tungsten oxide nanostructures, but it can also be extended to a large variety of other materials.