ON APPROACH OF OPTIMIZATION OF FORMATION OF INHOMOGENOUS DISTRIBUTIONS OF DOPANT IN A FIELD-EFFECT HETEROTRANSISTORS

Main Authors: E.L. Pankratov, E.A. Bulaeva
Format: Article
Terbitan: , 2015
Subjects:
Online Access: https://zenodo.org/record/1473890
Daftar Isi:
  • ABSTRACT : We introduce an approach of manufacturing of a field-effect heterotransistor with inhomogenous doping of channel. The inhomogenous distribution of concentration of dopant gives a possibility to change speed of transport of charge carriers and to decrease length of channel.