ON APPROACH OF OPTIMIZATION OF FORMATION OF INHOMOGENOUS DISTRIBUTIONS OF DOPANT IN A FIELD-EFFECT HETEROTRANSISTORS
Main Authors: | E.L. Pankratov, E.A. Bulaeva |
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Format: | Article |
Terbitan: |
, 2015
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Subjects: | |
Online Access: |
https://zenodo.org/record/1473890 |
Daftar Isi:
- ABSTRACT : We introduce an approach of manufacturing of a field-effect heterotransistor with inhomogenous doping of channel. The inhomogenous distribution of concentration of dopant gives a possibility to change speed of transport of charge carriers and to decrease length of channel.