ANALYSIS OF MANUFACTURING OF VOLTAGE RESTORE TO INCREASE DENSITY OF ELEMENTS OF THE CIRCUIT
| Main Authors: | E.L. Pankratov, E.A. Bulaeva |
|---|---|
| Format: | Article |
| Terbitan: |
, 2016
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/1182283 |
Daftar Isi:
- We introduce an approach for increasing density of voltage restore elements. The approach based on manufacturing of a heterostructure, which consist of a substrate and an epitaxial layer with special configuration. Several required sections of the layer should be doped by diffusion or ion implantation. After that dopants and/or radiation defects should be annealed.