Otomatisasi Proses Sputtering Berbasis Mikrokontroler AT89C51
| Main Authors: | Muchlas, M, Sutikno, Tole, Hermawan, Bambang |
|---|---|
| Format: | Article PeerReviewed Book |
| Bahasa: | eng |
| Terbitan: |
Universitas Ahmad Dahlan
, 2004
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| Subjects: | |
| Online Access: |
http://eprints.uad.ac.id/7125/1/2004-muchlas-TELKOMNIKA_otomatisasi-proses-sputtering.pdf http://eprints.uad.ac.id/7125/ |