PERANCANGAN RESONATOR MEMS BANDPASS FILTER MENGGUNAKAN RSG MOSFET UNTUK MOBILE WIMAX FREKUENSI 2,3 GHz
| Main Author: | Sarungallo, Pandung |
|---|---|
| Format: | Article info eJournal |
| Terbitan: |
Unversitas Papua
, 2012
|
| Online Access: |
http://jurnal.unipa.ac.id/index.php/istech/article/view/36 |
Daftar Isi:
- The use microelectromechanical system (MEMS) resonator has been developed in wireless communication application such as oscillator, RF switch and filter at the ultra high frequency domain. To reach that frequency level, resonator has to be stiff and as a result the mechanic movement become significant. This research discuss about MEMS bandpass filter RF mobile WIMAX resonator at 2.3 Hz frequency, in this case resonator as a mobile gate that resonate over the line, drain and source. This research design bandpass filter resonator using RSG Mosfet. This RSG Mosfet consists of polysilicon and ZnO combination, where the structure’s formed by polysilicon alone and polisilicon/ZnO piled (polysilicon-polysilicon/ZnO) which produce mechanical resonant frequency, 2.358 GHz for polysilicon and 2.352 GHz for polisilicon/ZnO.