Electron Beam Lithography of sensitive resist based on photoacid generator integrated terpolymer: potentiality of high-resolution pattern transfer

oleh Santu Nandi, Midathala Yogesh, Pulikanti Guruprasad Reddy, Satinder K. Sharma, Chullikkattil P. Pradeep, Subrata Ghosh, Kenneth E. Gonsalves
Terbitan: eI-Conference Proceedings, 2018

Optimizationof molecular weight distributionin terpolymerDUV Photoresists

oleh Midathala Yogesh, Santu Nandi, Satinder K. Sharma, Santu Nandi1,Satinder K. Sharma2,Chullikkattil P. Pradeep, Subrata Ghosh, Kenneth E. Gonsalves
Terbitan: eI-Conference Proceedings, 2018