Surface Roughness and Grain Size Characterization of Annealing Temperature Effect For Growth Gallium and Tantalum Doped Ba0.5 Sr0.5TiO3Thin Film

oleh Irzaman, Irzaman; Department of Physics, FMIPA Bogor Agricultural Unversity (BAU), BAU Campus Darmaga Gedung Wing S Bogor, Indonesia – 16680, Darmasetiawan, H.; Department of Physics, FMIPA Bogor Agricultural Unversity (BAU), BAU Campus Darmaga Gedung Wing S Bogor, Indonesia – 16680, Hardhienata, H.; Department of Physics, FMIPA Bogor Agricultural Unversity (BAU), BAU Campus Darmaga Gedung Wing S Bogor, Indonesia – 16680, Hikam, M.; Department of Physics, FMIPA UI, UI Campus Depok, Indonesia – 17000, Arifin, P.; Department of Physics, FMIPA ITB, Jalan Ganesa 10 Bandung, Indonesia – 40132, Jusoh, S.N.; School of Microelectronic Engineering, Universiti Malaysia Perlis, Jalan Bukit Lagi, 01000 Kangar Perlis, Malaysia., Taking, S.; School of Microelectronic Engineering, Universiti Malaysia Perlis, Jalan Bukit Lagi, 01000 Kangar Perlis, Malaysia., Jamal, Z.; School of Microelectronic Engineering, Universiti Malaysia Perlis, Jalan Bukit Lagi, 01000 Kangar Perlis, Malaysia., Idris, M.A.; School of Material Engineering, Universiti Malaysia Perlis, Jalan Bukit Lagi, 01000 Kangar Perlis, Malaysia
Terbitan: PPIKSN-BATAN, 2011