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Title
Phosphorus Dopant Diffusion, Activation, and Annealing. Using Infrared Laser for Synthesis of n-Type Silicon Thin Film
Article
Journal
oleh
M. Abul Hossion
,
Som Mondal
,
B. M. Arora
Terbitan:
2020
Institusi:
ZAIN Publications
Gedung:
Cognizance Journal of Multidisciplinary Studies
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Stockholm
Cognizance Journal of Multidisciplinary Studies
IOS16997.4040103
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Topik: spin-on dopant
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ZAIN Publications
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Cognizance Journal of Multidisciplinary Studies
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Hot-wire chemical vapor deposition (HWCVD)
1
infrared laser
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ion implantation
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n-type silicon
spin-on dopant
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thin film
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B. M. Arora
1
M. Abul Hossion
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Som Mondal
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2020
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