The Growth Mechanisms of Atomic Layer Deposition: An Overview
| Main Authors: | Riyanto, Edy, Martides, Erie, Junianto, Endro, Prawara, Budi |
|---|---|
| Format: | Article info application/pdf eJournal |
| Bahasa: | eng |
| Terbitan: |
Prodi Teknik Kimia, Fakultas Teknologi Industri, UPN "Veteran" Yogyakarta
, 2020
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| Subjects: | |
| Online Access: |
http://jurnal.upnyk.ac.id/index.php/eksergi/article/view/3714 http://jurnal.upnyk.ac.id/index.php/eksergi/article/view/3714/pdf |
Internet
http://jurnal.upnyk.ac.id/index.php/eksergi/article/view/3714http://jurnal.upnyk.ac.id/index.php/eksergi/article/view/3714/pdf
Lokasi
| Koleksi | Eksergi |
|---|---|
| Gedung | Perpustakaan UPN Veteran Yogyakarta |
| Institusi | UPN Veteran Yogyakarta |
| Kota | SLEMAN |
| Provinsi | DAERAH ISTIMEWA YOGYAKARTA |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |