Data for: Effect of Multi-functional Amines on SiGe Surface Finish During Chemical Mechanical Polishing
| Main Author: | Zhang, Baoguo |
|---|---|
| Other Authors: | Liu, Yuling, Wang, Chenwei, Wang, Ru, Yang, Shenghua, He, Yangang, Wang, Jianchao |
| Format: | Dataset |
| Terbitan: |
Mendeley
, 2019
|
| Subjects: | |
| Online Access: |
https:/data.mendeley.com/datasets/xtdv7rtn5h |
| Description not available. |