APA Citation

Zhang, B., Liu, Y., Wang, C., Wang, R., Yang, S., He, Y., & Wang, J. (2019). Data for: Effect of Multi-functional Amines on SiGe Surface Finish During Chemical Mechanical Polishing. Mendeley.

Chicago Style Citation

Zhang, Baoguo, Yuling Liu, Chenwei Wang, Ru Wang, Shenghua Yang, Yangang He, and Jianchao Wang. Data For: Effect of Multi-functional Amines On SiGe Surface Finish During Chemical Mechanical Polishing. Mendeley, 2019.

MLA Citation

Zhang, Baoguo, et al. Data For: Effect of Multi-functional Amines On SiGe Surface Finish During Chemical Mechanical Polishing. Mendeley, 2019.

Warning: These citations may not always be 100% accurate.