Composition dependence of dielectric and optical properties of Hf-Zr-silicate thin ???lms grown on Si(100) by atomic layer deposition
| Main Authors: | Tahir, Dahlang, Oh, Suhk Kun, Kang, Hee jae, Tougaard, Sven |
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| Format: | Article |
| Bahasa: | eng |
| Terbitan: |
ELSEVIER
, 2017
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| Subjects: | |
| Online Access: |
http://repository.unhas.ac.id/handle/123456789/24129 |
Internet
http://repository.unhas.ac.id/handle/123456789/24129Lokasi
| Koleksi | Repositori Universitas Hasanuddin |
|---|---|
| Gedung | Perpustakaan Universitas Hasanuddin |
| Institusi | Universitas Hasanuddin |
| Kota | KOTA MAKASSAR |
| Provinsi | SULAWESI SELATAN |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |