Lokasi: Catalytic Carbon Submicron Fabrication Using Home- Built Very-High Frequency Plasma Enhanced Chemical Vapour Deposition

Catalytic Carbon Submicron Fabrication Using Home- Built Very-High Frequency Plasma Enhanced Chemical Vapour Deposition

Main Authors:	Sukirno, Sukirno; 1Laboratory for Electronic Material Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung 40132, Indonesia, Bisri, Satria Zulkarnaen; 1Laboratory for Electronic Material Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung 40132, Indonesia 2Institute for Material Research, University of Tohoku, Japan, Sari, Rasih Yulia; 1Laboratory for Electronic Material Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung 40132, Indonesia, Hasanah, Lilik; 1Laboratory for Electronic Material Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung 40132, Indonesia, Mursal, Mursal; 1Laboratory for Electronic Material Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung 40132, Indonesia, Usman, Ida; 1Laboratory for Electronic Material Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung 40132, Indonesia, Darsikin, Darsikin; 1Laboratory for Electronic Material Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung 40132, Indonesia
Format:	Article info application/pdf eJournal
Bahasa:	eng
Terbitan:	ITB Journal Publisher, LPPM ITB , 2013
Subjects:	250oC 70 MHz dc Unbalanaced Magnetron Sputtering fabrication of CNT by VHF PECVD
Online Access:	http://journals.itb.ac.id/index.php/jmfs/article/view/41 http://journals.itb.ac.id/index.php/jmfs/article/view/41/37

Internet

http://journals.itb.ac.id/index.php/jmfs/article/view/41
http://journals.itb.ac.id/index.php/jmfs/article/view/41/37

Lokasi

Koleksi	Journal of Mathematical and Fundamental Sciences
Gedung	Perpustakaan Institut Teknologi Bandung
Institusi	Institut Teknologi Bandung
Kota	KOTA BANDUNG
Provinsi	JAWA BARAT
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