ELEMENTAL COMPOSITION OF REACTIVELY SPUTTERED INDIUM NITRIDE THIN FILMS
| Main Authors: | Kumar, Sunil, Mo, Li, Motlan, , Tansley, T.L. |
|---|---|
| Format: | Article PeerReviewed |
| Terbitan: |
IOP Science
, 1996
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| Subjects: | |
| Online Access: |
http://digilib.unimed.ac.id/35828/ https://doi.org/10.1143/JJAP.35.2261 |
Internet
http://digilib.unimed.ac.id/35828/https://doi.org/10.1143/JJAP.35.2261
Lokasi
| Koleksi | Digital Repository Universitas Negeri Medan |
|---|---|
| Gedung | Perpustakaan Universitas Negeri Medan |
| Institusi | Universitas Negeri Medan |
| Kota | KOTA MEDAN |
| Provinsi | SUMATERA UTARA |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |