A Review of Atomic Layer Deposition for Nanoscale Devices
| Main Authors: | Riyanto, Edy, Rijanto, Estiko, Prawara, Budi |
|---|---|
| Format: | Article info application/pdf eJournal |
| Bahasa: | eng |
| Terbitan: |
Research Centre for Electrical Power and Mechatronics, Indonesian Istitutes of Sciences
, 2012
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| Subjects: | |
| Online Access: |
http://www.mevjournal.com/index.php/mev/article/view/99 http://www.mevjournal.com/index.php/mev/article/view/99/61 |
Internet
http://www.mevjournal.com/index.php/mev/article/view/99http://www.mevjournal.com/index.php/mev/article/view/99/61
Lokasi
| Koleksi | Mechatronics, Electrical Power, and Vehicular Technology |
|---|---|
| Gedung | Lembaga Ilmu Pengetahuan Indonesia |
| Institusi | Lembaga Ilmu Pengetahuan Indonesia |
| Kota | JAKARTA SELATAN |
| Provinsi | DKI JAKARTA |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |