| Main Authors: |
Yuki Nishimori; Research Institute of Electronics, Shizuoka University, 3-5-1 Johoku, Naka-ku, Hamamatsu 432-8011, Japan, Shinji Ueki; PMEMS Project, OMRON Corporation, 686-1 Ichimiyake, Yasu, Shiga 520-2362, Japan, Masakazu Sugiyama; Department of Engineering and Information Systems, The University of Tokyo, 2-11-16 Yayoi, Bunkyo-ku,
Tokyo 113-8656, Japan, Seiji Samukawa; Institute of Fluid Science, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan, Gen Hashiguchi; BEANS Project 3D BEANS Center, 4-6-1 Komaba, Meguro-ku, Tokyo 153-8505, Japan |
| Format: |
Article
application/pdf
eJournal
|
| Bahasa: |
eng
|
| Terbitan: |
Directorate of Research and Community Engagement, Universitas Indonesia
, 2013
|
| Online Access: |
http://journal.ui.ac.id/index.php/technology/article/view/1948
|
