Low Temperature In-Situ Sequential Chemical Vapor Deposition of Ti:TiN Ultrathin Bilayers for ULSI Barrier Applications
| Main Authors: | Goldberg, Cindy, Arkles, Barry, Kaloyeros, Alain, Eisenbraun, Eric, Ivanovna, Ana |
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| Format: | Article eJournal |
| Bahasa: | eng |
| Terbitan: |
Materials Research Society
, 1995
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/3555615 |
Internet
https://zenodo.org/record/3555615Lokasi
| Koleksi | Marga Life in South Sumatra in the Past: Puyang Concept Sacrificed and Demythosized |
|---|---|
| Gedung | Perpustakaan Universitas PGRI Palembang |
| Institusi | Universitas PGRI Palembang |
| Kota | KOTA PALEMBANG |
| Provinsi | SUMATERA SELATAN |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |