Low Temperature Oxidation by Continuous UV Generated Ozone on Nanometer-thick Amorphous Silicon Surface as Characterized by XPS
| Main Author: | Yudi Darma; Quantum Semiconductor and Devices Laboratory, Physics Department, Faculty of Mathematics and Natural Sciences Institut Teknologi Bandung |
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| Format: | Article application/pdf eJournal |
| Bahasa: | eng |
| Terbitan: |
Institut Teknologi Bandung
, 2012
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| Subjects: | |
| Online Access: |
http://journal.fmipa.itb.ac.id/jms/article/view/340 |
Internet
http://journal.fmipa.itb.ac.id/jms/article/view/340Lokasi
| Koleksi | Jurnal Matematika & Sains |
|---|---|
| Gedung | Perpustakaan Institut Teknologi Bandung |
| Institusi | Institut Teknologi Bandung |
| Kota | KOTA BANDUNG |
| Provinsi | JAWA BARAT |
| Kontak | Butuh informasi lebih lanjut? Hubungi pustakawan institusi ini. |