Metal-embedded SU-8 Slab Techniques for Low-resistance Micromachined Inductors
| Main Authors: | Mapato, Manot, Klysuban, Prapong, Kulworawanichpong, Thanatchai, Chomnawang, Nimit |
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| Format: | Article |
| Terbitan: |
, 2018
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/4106294 |