Enhancement of piezoelectric properties of lithium niobate thin films by different annealing parameters
Main Authors: | Zhukov, Roman N., Kushnerev, K.S., Kiselev, Dmitry A., Ilina, Tatiana S., Kubasov, Ilya V., Kislyuk, Alexander M., Malinkovich, Mikhail D., Parkhomenko, Yuri N. |
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Format: | Article |
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NUST MISiS
, 2020
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Online Access: |
https://zenodo.org/record/4029913 |