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Enhancement of piezoelectric properties of lithium niobate thin films by different annealing parameters

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Main Authors: Zhukov, Roman N., Kushnerev, K.S., Kiselev, Dmitry A., Ilina, Tatiana S., Kubasov, Ilya V., Kislyuk, Alexander M., Malinkovich, Mikhail D., Parkhomenko, Yuri N.
Format: Article
Terbitan: NUST MISiS , 2020
Subjects:
Lithium niobate rf magnetron sputtering post-growth heat treatment scanning probe microscopy piezoelectric force microscopy histogram of distribution of vertical and lateral piezoresponse
Online Access: https://zenodo.org/record/4029913
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https://zenodo.org/record/4029913

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