MODELING OF REDISTRIBUTION OF INFUSED DOPANT IN A MULTILAYER STRUCTURE DOPANT UNDER INFLUENCE OF VARIATION OF PRESSURE OF VAPOR OF THE DOPANT
| Main Authors: | E.L. Pankratov, E.A. Bulaeva |
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| Format: | Article |
| Terbitan: |
, 2020
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| Subjects: | |
| Online Access: |
https://zenodo.org/record/3676668 |